Copper Select™ technologies provide reliable and cost effective treatment of CuCMP slurries produced in the integrated circuit board manufacturing industry.
The majority of the copper CMP waste waters produced have similar typical characteristics. The Copper Select™ process is being used at many semiconductor Fabs around the world to successfully treat copper-bearing CMP waste waters. The patented process removes copper from waste water without removing the CMP slurry particles. Studies have shown the process to be very successful with most commercially available copper slurry formulations.